Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.11a
- /
- Pages.333-335
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- 1997
A Study on Hydrogen Detection Characteristics of the Pt-MIS Capacitor Device
Pt-MIS Capacitor 소자의 수소가스 검지특성에 관한 연구
- Kwon, K.H. (Korea Univ.) ;
- Yi, S.H. (Korea Univ.) ;
- Kim, Y.H (Korea Univ.) ;
-
Rhie, D.H.
(Suwon Univ.)
;
- Sung, Y.K. (Korea Univ.)
- Published : 1997.11.29
Abstract
This paper was performed to investigate the characteristic of the Pt-MIS(Metal Insulator Semiconductor) capacitor composed of the LPCVD nitride on the oxide for the hydrogen gas detection. Pt was used as catalytic metal for detecting the hydrogen gas and the flat band voltage shift was measured at various hydrogen concentration and catalytic metal thickness. We found the flat band voltage shift was proportional to the hydrogen concentration and catalytic metal thickness was little effect to the response time.
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