대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

레이저 공정을 이용한 초전도 통신소자 제작과 고주파특성 연구

Study on the synthesis and the frequency response of HTS microwave device fabricated by pulsed laser deposition

  • 박주형 (연세대학교 전기공학과) ;
  • 정영식 (연세대학교 전기공학과) ;
  • 이상렬 (연세대학교 전기공학과)
  • Park, Joo-Hyung (Department of Electrical Engineering, Yonsei University) ;
  • Jeong, Young-Sik (Department of Electrical Engineering, Yonsei University) ;
  • Lee, Sang-Yeol (Department of Electrical Engineering, Yonsei University)
  • 발행 : 1997.11.29
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초록

Pulsed laser ablation has been used to fabricate superconducting $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The epitaxial YBCO thin films were grown at $750^{\circ}C$ and oxygen partial pressure of 200 mTorr. The electrical property and the characteristics of the YBCO thin films have been studied by R-T measurement. scanning electron microscopy (SEM) and X-ray diffraction (XRD). A microstrip line resonator has been fabricated using YBCO superconducting thin films by photolithography and wet-etch process. The resonator has linear microstrip line separated by a gap of 0.278 mm. We observed a fundamental resonance peak at the frequency of 10.007 GHz.

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