Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Study on the fabrication of DLC thin films by pulsed laser deposition

펄스 레이저 증착법에 의한 DLC 박막 제작 연구

  • Jeong, young-Sik (Department of Electrical Engineering, Yonsei University) ;
  • Eun, Dong-Seog (Department of Electrical Engineering, Yonsei University) ;
  • Lee, Sang-Yeol (Department of Electrical Engineering, Yonsei University) ;
  • Jung, Hae-Suk (Department of Ceramic Engineering, Yonsei University) ;
  • Park, Hung-Ho (Department of Ceramic Engineering, Yonsei University)
  • 정영식 (연세대학교 전기공학과) ;
  • 은동석 (연세대학교 전기공학과) ;
  • 이상렬 (연세대학교 전기공학과) ;
  • 정해석 (연세대학교 세라믹공학과) ;
  • 박형호 (연세대학교 세라믹공학과)
  • Published : 1997.11.29
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Abstract

We have deposited hydrogen-free diamond-like carbon (DLC) films by pulsed laser deposition of graphite. Pulsed laser deposition (PLD) can be utilized to generate films with desired properties quite different from those of the starting material. Since DLC films grown by PLD using turbo pump are perpared without hydrogen, they have a higher density and a higher index of refraction than the hydrogenated DLC films. In this study, effects of the substrate temperature and laser energy density on the properties of DLC films were systematically investigated. The structure and properties of the films have been studied by scanning electron microscopy (SEM), Fourier Transform Infrared (FT-IR), X-ray diffraction (XRD), and Raman spectroscopy.

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