Numerical Analysis of Discharge in Wire ion Plasma Source

입자법을 이용한 와이어.이온.플라즈마원의 해석

  • 송태헌 (한양대학교대학원 전기공학과) ;
  • 고광철 (한양대학교 전자전기공학부) ;
  • 강형부 (한양대학교 전자전기공학부)
  • Published : 1997.11.01

Abstract

Wire Ion Plasma Source (WIPS) is a plasma device which has a thin wire anode, a coaxially-set cylindrical cathode and electrodes located in both ends of the cylinder. The potential between the anode and cathode changes logarithmically by this electrode configuration. This electrode configuration enables high-density plasma to produce even at a low anode voltage. Since the electrode configuration is axially symmetric and long. plasma with axially uniform number density can be produced. Using particle-in-cell(PIC) and Monte Carlo collision(MCC), we investigate the traiectory of electrons and the characteristics of D.C. discharge in Wire ton Plasma Source.

Keywords