Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1997.11a
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- Pages.343-346
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- 1997
The Fabrication of Chromiun Thin-Film Strain Gauges and Its Characteristics
크롬박막 스트레인 게이지의 제작과 그 특성
Abstract
This paper presents the basic characteristics of Cr thin-film, which were deposited on glass by DC magnetron sputtering. The optimized deposition condition of Cr thin-film strain gauges were input power 7w/cm
Keywords