한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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- Pages.188-193
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- 1997
산화아연 박막의 전기저항률 변화에 관한 연구
A Study on Electrical Resistivity Variation 7f Zinc Oxide Thin Film
초록
ZnO thin film had been deposited on the glass 7r sputtering method, and investigated by electrical and structural properties. When the rf power was 188W and sputtering pressure was 1
키워드