엑시머 레이저를 이용한 3차원 마이크로가공

Three Dimensional Micromachining using Excimer laser

  • 최경현 (제주대학교 기계공학부) ;
  • 배창현 (부산대학교 지능기계공학과) ;
  • 이석희 (부산대학교 기계공학부) ;
  • 발행 : 1997.10.01

초록

A new 3D micromachining method, called Hole Area Modulation(HAM), has been introduced and experimentally confirmed its feasibility. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. This method can be applied for machining various kinds of microcavities in various materials. In this paper, a mathematical model for excimer laser micromachining based on HAM and also determination of the optimal laser ablation conditions(width, Hole radius, step size, path, etc.) is completed by employing using Genetic Algorithm(GA).

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