유정압테이블 수정가공 알고리즘의 실험적 검증

Experimental Verification on Corrective machining Algorithm of Hydrostatic Table

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective lapping work to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13pm of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07pm of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by the unskilled person after he experienced a little of preliminary machining. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.