한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 1997년도 추계학술대회 논문집
- /
- Pages.336-340
- /
- 1997
- /
- 2005-8446(pISSN)
마이크로 스테이지의 유한요소법을 이용한 최적설계와 초정밀 위치제어에 관한 연구
A Study on the Optimal Structural Design and Ultra Precision Position Control using FEM for Micro Stage
-
Kim, J. Y.
(Mech.Eng.Dept., CSU)
;
-
Han, J. H.
(Graduate School,CSU)
;
-
Kim, H. W.
(Auto.Eng.,SWC)
;
- You, S. (MSC) ;
-
Kwac, L. K.
(Graduate School,CSU)
;
- Song, I. S. (Graduate School,CSU)
- 발행 : 1997.10.01
초록
For optimal design of micro stage, we were measured to displacement of piezo-electric transducer that was based on voltage value. And then researchers were analyzed to microstage through FEM with displacement data including voltage value of piezo-electric transducer. For verification of analyzing results, we were gauged on displacement by using Laser-interferometer. And researchers were confirmed to propriety of micro stage design with FEM, were obtained error rate that are 3.5% between measurement results and analyzing results.