Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.116-116
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- 1997
Characterization of YSZ(Yttria-stabilized zirconia) thin film by RF-magnetron sputtering
RF-magnetron sputtering를 이용한 YSZ(Yttria-stabilized zirconia) 박막의 제조 및 특성 평가
Abstract
Keywords