Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.66-66
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- 1997
Study of RuO$_2$ Thin Film Fabrication by Thermal and Plasma Chemical Vapor Deposition
Thermal과 Plasma 화학기상증착법을 이용한 RuO$_2$ 박막형성에 관한 연구
Abstract
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