Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.54-54
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- 1997
Studies on the removal of metallic impurities on Si surface by dry cleaning
건식세정에 의한 Si 표면의 금속불순물 제거에 관한 연구
- Park, Ung ;
- Lee, Jong-Mu ;
- Ahn, Tae-Hang ;
- Chun, Hyeong-Tak
- Published : 1997.10.01
Abstract
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