Theoretical Composition Calibration and Thickness Measurement in the Analysis of Multicomponent Films using Wavelength Dispersive Spectroscopy: Applications to PZT and PLZT Systems

WDS로 측정한 다성분계 박막 조성의 이론적인 보정 및 두께 계산: PZT 및 PLZT계 박막에의 응용

  • Published : 1997.05.01