한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)

한국재료학회 (Materials Research Society of Korea)
권호 표지

Surface modification of SiOF films by post plasma treatment

  • Lee, Seoghyeong (Dept. of Metallurgical Engineering, Hanyang University) ;
  • Yoo, Jae-Yoon (Dept. of Metallurgical Engineering, Hanyang University) ;
  • Park, Jong-Wan (Dept. of Metallurgical Engineering, Hanyang University)
  • 발행 : 1997.05.01
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