Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
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- Pages.47-48
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- 1997
Surface modification of SiOF films by post plasma treatment
- Lee, Seoghyeong (Dept. of Metallurgical Engineering, Hanyang University) ;
- Yoo, Jae-Yoon (Dept. of Metallurgical Engineering, Hanyang University) ;
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Park, Jong-Wan
(Dept. of Metallurgical Engineering, Hanyang University)
- Published : 1997.05.01
Abstract
Keywords