Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
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- Pages.31-31
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- 1997
Formation of aluminum nitride on sapphire surface using plasma activated nitrogen source
Plasma로 활성화된 질소원자를 사용한 sapphire 표면의 Aluminum Nitride 형성
Abstract
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