Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
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- Pages.28-28
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- 1997
A Study on etch characteristics of Mo compound fabricated by magnetron sputtering
Magnetron 스퍼터링으로 제조된 Mo 화합물의 건식식각 특성에 관한 연구
Abstract
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