02)567-9486
English
한국어
English
The Korean Vacuum Society
http://www.kvs.or.kr
Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
1997.07a
/
Pages.210-210
/
1997
The Korean Vacuum Society (한국진공학회)
Inductively Coupled Plasma 방전의 Global Modelling 과 Simulation
유광일
(기초과학지원연구소) ;
윤남식
(기초과학지원연구소) ;
황순모
(기초과학지원연구소)
Published : 1997.07.01
PDF
Download PDF
〈 Previous
Next 〉
Abstract
Keywords
Detail Search
×
Title, Summary, Keyword
Publications
Publication Year
Volume
Issue
Page
Author
Affiliation
Publisher
DOI
Publication Type
Journal
Conference Proceeding Paper
Magazine