Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.07a
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- Pages.158.1-158
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- 1997
Initial Growth Stage of $Y_2O_3$
- Cho, M.H. (Depppartment of Physics, Yonsei University) ;
- Whangbo, S.W. (Department of Physics, Yonsei University) ;
- Koh, W.S. (Department of Physics, Yonsei University) ;
- Whang, C.N. (Department of Physics, Yonsei University) ;
- Choi, S.C. (Ceramics Division, Korea Institute of Science and Technology) ;
- Kang, S.B. (Semiconductor Research Center, Samsung electronics Co., Ltd) ;
- Lee, S.I. (Semiconductor Research Center, samsung electronics Co., Ltd) ;
- Lee, M.Y. (Semiconductor Research Center, samsung electronics Co., Ltd)
- Published : 1997.07.01
Abstract
Keywords