Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.07a
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- Pages.156-156
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- 1997
Ultraviolet-Ozone cleaning process of organic surface contamination layers
- Moon, D.W. (Surface Analysis Groupp, Korea Research Institute of Standard and Science Yusung pp.O. #102., Taejon 305-606) ;
- A.Kurokawa S.Ichimura (Surface Engineering Section, Electrotechnical laboratory, ibaraki, Jappan) ;
- John, In-Cheol (Deppartment of Chemistry, Cheonbuk University, Jonju) ;
- Lee, Hae-Won (Department of Chemistry, Cheonbuk University)
- Published : 1997.07.01
Abstract
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