한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1997년도 제13회 학술발표회 논문개요집
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- Pages.151-151
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- 1997
How long can a monolayer thick silicon nitride island sustain oxygen exposure \ulcorner
- Ha, Jeong-Sook (Research Deppartment, electronics and Telecommunications Research Institute) ;
- Park, Kang-Ho (Research Deppartment, electronics and Telecommunications Research Institute) ;
- Yun, Wan-Soo (Research Deppartment, electronics and Telecommunications Research Institute) ;
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Lee, El-Hang
(Research Deppartment, electronics and Telecommunications Research Institute)
- 발행 : 1997.07.01