Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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TOF-SIMS 와 XppS를 이용한 Cu/Polyimide 계면 연구

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  • Duda. L (University of Muenster, Germany) ;
  • Wolany D (University of Muenster, Germany) ;
  • Benninghoven A. (University of Muenster, Germany)
  • 이종완 (LG 종합기술원 소자재료연구소) ;
  • ;
  • ;
  • Published : 1997.07.01
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Abstract

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