Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.07a
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- Pages.74-74
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- 1997
Modeling and initial growth mechanism of thin film by measurement method of electrical conductivity of substrate (SC model)
- Song Seok-Kyun (Division of Ceramics, Korea Institute of Science and Technology Cheongryang, pp.O. Box 131, Seoul) ;
- Yoon Young Soo (Division of Ceramics, Korea Institute of Science and Technology Cheongryang, pp.O. Box 131, Seoul) ;
- Jung Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology Cheongryang, pp.O. Box 131, Seoul) ;
- Koh Seok-Keun (Division of Ceramics, Korea Institute of Science and Technology Cheongryang, pp.O. Box 131, Seoul) ;
- Baik Hong-Koo (Deppartment of Metallurgical Engineering, Yonsei University, Sudaemoon Ku, Shincheon Dong, Seoul)
- Published : 1997.07.01
Abstract
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