Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.07a
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- Pages.37-38
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- 1997
Influence of $CCl_4$ on GaAs surface morphology during the AP-MOCVD GaAs growth
- Jun, Sung-Won (Semiconductor Materials Research Center, Division of Electronics and Information Technology, KIST) ;
- Min, B.-D. (Semiconductor Materials Research Center, Division of Electronics and Information Technology, KIST) ;
- Kim, Y. (Semiconductor Materials Research Center, Division of Electronics and Information Technology, KIST) ;
- Kim, E.K. (Semiconductor Materials Research Center, Division of Electronics and Information Technology, KIST) ;
- Min, S.-K. (Semiconductor Materials Research Center, Division of Electronics and Information Technology, KIST) ;
- Seong, T.-Y. (Department of Materials Science and Engineering, K-JIST)
- Published : 1997.07.01
Abstract
Keywords