Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.07a
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- Pages.35-35
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- 1997
Prepparation of High Quality $RuO_2$ Electrodes for High Delectric Thin Films by Low Pressure Metal Organic Chemical Vapor Deposition
- Lee, J.M. (School of Materials Science and Engineering, Seoul National University) ;
- Kim, H.J. (School of Materials Science and Engineering, Seoul National University) ;
- Hwang, C.S. (Semiconductor R&D Center,Samsung electronics Co, Ltd) ;
- Suk, C.G. (R&D Cebter, APEX Co. LTD)
- Published : 1997.07.01
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