Fabrication of Silicon Field Emitter Array with a Focusing Electrode by Chemical-Mechanical-Polishing Process

  • Lee, Jin-Ho (Semiconductor Technology Div., Electronics and Telecommunications Research Institute, Yusong pp.O. Box 106, Taejon, 305-600) ;
  • Song, Yoon-Ho (Semiconductor Technology Div., Electronics and Telecommunications Research Institute, Yusong pp.O. Box 106, Taejon, 305-600) ;
  • Cho, Kyoung-Ik (Semiconductor Technology Div., Electronics and Telecommunications Research Institute, Yusong pp.O. Box 106, Taejon, 305-600) ;
  • Lee, Sang-Yun (Department of Physics, Kyungppook National University) ;
  • Yoo, Hyung-Joun (Department of Physics, Kyungppook National University)
  • 발행 : 1997.02.01