Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.213-214
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- 1997
Fabrication of Silicon Field Emitter Array with a Focusing Electrode by Chemical-Mechanical-Polishing Process
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Lee, Jin-Ho
(Semiconductor Technology Div., Electronics and Telecommunications Research Institute, Yusong pp.O. Box 106, Taejon, 305-600) ;
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Song, Yoon-Ho
(Semiconductor Technology Div., Electronics and Telecommunications Research Institute, Yusong pp.O. Box 106, Taejon, 305-600) ;
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Cho, Kyoung-Ik
(Semiconductor Technology Div., Electronics and Telecommunications Research Institute, Yusong pp.O. Box 106, Taejon, 305-600) ;
- Lee, Sang-Yun (Department of Physics, Kyungppook National University) ;
- Yoo, Hyung-Joun (Department of Physics, Kyungppook National University)
- Published : 1997.02.01
Abstract
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