Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.196-196
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- 1997
Hillock Prevention of Al Thin Film on Glass Substrate Using Plasma Source Ion Implantation Technique
- Han, Seung-Hee (Advanced Analysis Center Korea institute of Science and Technology) ;
- Yeon-Hee, Lee (Advanced Analysis Center Korea institute of Science and Technology) ;
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Kim, Hai-Dong
(Department of Chemistry, Kyunghee University)
;
- Kim, Gon-Ho (Department of Physics, Hanyang University) ;
- Lee, Jung-Hye (Advanced Analysis Center Korea institute of Science and Technology) ;
- Yoon, Jung-Hyeon (Advanced Analysis Center Korea institute of Science and Technology) ;
- Kim, Gun-Woo (Department of Physics, Hanyang University)
- Published : 1997.02.01
Abstract
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