한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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- Pages.98-99
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- 1997
Developpment of 3-Dimensional MC Ion Implantation Simulator
- Son, Myung-Sik (Semiconductor Process and Device Laboratory Deppt. of Electronics Engineering, Chung-Ang University) ;
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Hwang, Ho-Jung
(Semiconductor process and Device Laboratory Deppt. of Electronics Engineering, Chung-Ang University)
- 발행 : 1997.02.01