Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.47-48
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- 1997
Reduction of the defect density in GaN films
- Hwang, Jin-Soo (Korea Reseach Institute of Chemical Technology) ;
- Tanaka, Satoru (The Institute of Physical and Chemical Research) ;
- Iwai, Sohachi (The Institute of Physical and Chemical Research) ;
- Aoyagi, Yoshinobu (The Institute of Physical and Chemical Research) ;
- Chong, Paul Joe (Korea Reseach Institute of Chemical Technology)
- Published : 1997.02.01
Abstract
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