Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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PSII (pplasma source Ion Impplantation) - Applications & ppersppective -

  • Conrad, John R. (PSII Laboratory Nuclear Engineering and engineering Physics Department University of Wisconsin)
  • Published : 1997.02.01
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