볼스크류를 이용한 유정압테이블의 고정밀위치 결정

Positioning accuracy largely depends on the variation of friction force in guide table, geometric accuracy of feed unit like as ballscrew and controllable accrecy of servo unit, in general. This paper deals with improvement of microstep resolution about hydrostatic table. Torque control mode have a advantage in microstep test, and more stable than velocity control mode in low velocity motion. Hydro static table have the elastic behavior within several .mu.m, so different character exist between the elastic motion and rolling motion. Integral gain is dominant than other gain in elastic motion. In order to improve response time in elastic motion,increasing gain is suggested within the stable region.