한국결정성장학회:학술대회논문집 (Proceedings of the Korea Association of Crystal Growth Conference)
- 한국결정성장학회 1997년도 Proceedings of the 13th KACG Technical Meeting `97 Industrial Crystallization Symposium(ICS)-Doosan Resort, Chunchon, October 30-31, 1997
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- Pages.141-144
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- 1997
3C-SiC/Si 에피층 성장과 Ga 불순물 효과
초록
High quality 3C-SiC epilayer was grown on Si(111) at 125
키워드