진공증착중합법에 의해 제조된 6FDA/DDE 폴리이미드박막의 열처리에 따른 특성에 관한 연구

A study on the curing characteristics of polyimide thin film fabricated by vapor deposition polymerization

  • 발행 : 1997.07.21

초록

In this paper, thin films of PI were fabricated VDPM of dry processes which are easy to control the film's thickness and hard to pollute due to volatile solvents. From FT-IR, PAA thin films fabricated by VDP were changed to PI thin films by thermal curing. From AFM and ellipsometer experimental, the higher curing temperature is, the films thickness decreases and reflectance increases. Therefore, PI could be fabricated stable by increasing curing temperature.

키워드