대향타겟식 스퍼터로 제작된 Co-Cr 박막의 자기적 특성

The Magnetic Characteristics of Co-Cr Thin Films Deposited by Facing Targets Sputtering

The distribution of coercivity in the thickness direction were investigated by using Kerr hysteresis loop tracer for the Co-Cr films deposited by Facing Targets Sputtering apparatus. It $H_{c{\bot}}(S)- H_{c{\bot}}(I)$ correlated strongly with ${\Delta}H_c$, which represents the degree of distribution of coercivity. Furthermore, the Cr content was varied in order to improve the coercivity of intial growth layer $H_{c{\bot}}(I)$ took a maximum value of 750 Oe and the distribution of coercivity became sharper at the Cr content of 25 at.%.