Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07d
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- Pages.1314-1316
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- 1997
Fabrication and Properties of Thin-Film Inductors with Magnetic Core
박막 자심 인덕터의 제조와 특성
- Kim, Hyun-Sik (Dept. of inorganic Material Eng. Kyungnam Univ) ;
- Min, Bok-Ki (KERI, Amorphous Team) ;
- Byun, Woo-Bong (KERI, Amorphous Team) ;
- Kim, Ki-Uk (KERI, Amorphous Team) ;
- Song, Jae-Sung (KERI, Amorphous Team) ;
- Oh, Young-Woo (Dept. of inorganic Material Eng. Kyungnam Univ)
- 김현식 (경남대학교 무기재료공학과) ;
- 민복기 (한국전기연구소 비정질재료연구팀) ;
- 변우봉 (한국전기연구소 비정질재료연구팀) ;
- 김기욱 (한국전기연구소 비정질재료연구팀) ;
- 송재성 (한국전기연구소 비정질재료연구팀) ;
- 오영우 (경남대학교 무기재료공학과)
- Published : 1997.07.21
Abstract
In this study, We fabricated thin film magnetic core inductors by using thin film manufacturing techniques such as photolithography and wet etching process. The inductors were prepared using multi-layered CoNbZr/Cu/CoNbZr. These devices are measured at high frequency range of
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