Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07d
- /
- Pages.1314-1316
- /
- 1997
Fabrication and Properties of Thin-Film Inductors with Magnetic Core
박막 자심 인덕터의 제조와 특성
-
Kim, Hyun-Sik
(Dept. of inorganic Material Eng. Kyungnam Univ)
;
-
Min, Bok-Ki
(KERI, Amorphous Team)
;
-
Byun, Woo-Bong
(KERI, Amorphous Team)
;
- Kim, Ki-Uk (KERI, Amorphous Team) ;
-
Song, Jae-Sung
(KERI, Amorphous Team)
;
-
Oh, Young-Woo
(Dept. of inorganic Material Eng. Kyungnam Univ)
-
김현식
(경남대학교 무기재료공학과)
;
-
민복기
(한국전기연구소 비정질재료연구팀)
;
-
변우봉
(한국전기연구소 비정질재료연구팀)
;
- 김기욱 (한국전기연구소 비정질재료연구팀) ;
-
송재성
(한국전기연구소 비정질재료연구팀)
;
-
오영우
(경남대학교 무기재료공학과)
- Published : 1997.07.21
Abstract
In this study, We fabricated thin film magnetic core inductors by using thin film manufacturing techniques such as photolithography and wet etching process. The inductors were prepared using multi-layered CoNbZr/Cu/CoNbZr. These devices are measured at high frequency range of
Keywords