Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07d
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- Pages.1229-1231
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- 1997
Dielectric Properties and Leakage Current Characteristics of PZT Heterolayered Thin Films by the Sol-Gel Method
Sol-Gel 법으로 제작한 PZT이종층 박막의 운전 및 누설전류 특성
- Shim, Kwang-Taek (Dept. of Electronic Materials Eng. Kwnagwoon Univ) ;
- Lee, Young-Hie (Dept. of Electronic Materials Eng. Kwnagwoon Univ) ;
- Lee, Sung-Gap (Dept. of Electronic Eng. SeoNam Univ) ;
- Bae, Seon-Gi (Dept. of Electric Eng Inchon Univ)
- Published : 1997.07.21
Abstract
In this work, PZT(20/80)/(80/20) heterolayered thin film that has the tetragonal and rhombohedral structure was fabricated by Sol-Gel method spin-coated on the Pt/Ti/
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