AC PDP용 MgO의 형성조건과 2차전자방출계수의 상관관계에 관한 연구

The Study on the relationships between $\gamma$-Coefficients and prepared conditions of MgO in ac PDP

  • 발행 : 1997.07.21

초록

MgO protection layer on the dielectric layer in PDP prevents a dielectric layer from sputtering and lowers the firing voltage due to a large $\gamma$-Coefficients. Until now, the MgO protection layer is mainly prepared by E-beam evaporation. However, there are some problems that is easy pollution and change of its characteristics with time and delamination. Therefore in this study. MgO protection layer is prepared on dielectric layer by R.F. magnetron sputtering with Mg target under various conditions. The sputtered MgO shows the better discharge characteristics compared with MgO deposited by E-beam evaporatior.

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