Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07e
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- Pages.1830-1833
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- 1997
Electron Swarm Parameter Characteristic in $SiH_4$ Plasma by TOF Method
TOF법을 이용한 $SiH_4$ 프라즈마중의 전자군파라미터특성
- Lee, Hyung-Yoon (Dongguk Univ.) ;
- Ha, Sung-Chul (Dongguk Univ.) ;
- Yu, Heoi-Young (Daelim Juni.) ;
- Kim, Sang-Nam (Inchon Juni.) ;
- Lim, Sang-Won (Dongguk Univ.) ;
- Moon, Ki-Seok (Dongguk Univ.)
- Published : 1997.07.21
Abstract
This paper describes the electron transport characteristic in
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