The Role of Material Gases and Gas Supply System Applied in Semiconductor Process
반도체공정에서 사용되는 재료가스의 역할과 가스공급시스템
- Tack Han Ju (Daesung Cryogenic Research Institute) ;
-
Lee Taeck Hong
(Daesung Cryogenic Research Institute) ;
- Park Doo Seon (Daesung Cryogenic Research Institute) ;
- Son Moo Ryong (Daesung Cryogenic Research Institute)
- Published : 1997.09.01
Abstract
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