Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1996.11a
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- Pages.254-257
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- 1996
Development of the RTP System for Metal Alloy using One Lamp
한 개의 Lamp를 이용한 Metal Alloy용 RTP 장비 개발
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Choi, Jin-Ho
(Pusan University of Foreign Studies Dept. Computer Engineering) ;
- Lee, Dong-Youb (Kyong-Ju Junior College Dept. Electricity)
- Published : 1996.11.16
Abstract
A Rapid Thermal Processing (RTP) system operated below
Keywords