Position Control of Ultra-Precision Machine Tool Post using Piezoelectric Material(1)

압전 재료를 이용한 초정밀 가공기용 공구 위치 제어(1)

This paper presents a position control of ultra-precision machine tool post using piezoelectric material. A stack-type piezoelectric actuator Is employed in a hinge-type tool holder. An assumed linear transfer function of the practical nonlinear plant is established through the comparison of transfer functions and step responses in the experiments and the simulations. Several types of feedforward/feedback controllers are designed via computer simulations using the assumed linear transfer function. The position tracking control experiments are undertaken to show the control efficiency of each controller.