한국원자력학회:학술대회논문집 (Proceedings of the Korean Nuclear Society Conference)
- 한국원자력학회 1996년도 추계학술발표회논문집(2)
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- Pages.506-511
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- 1996
$UO_2$ Etching by Fluorine Containing Gas Plasma
- Min, Jin-Young (Nuclear engineering department, Hanyang university) ;
- Kim, Yong-Soo (Nuclear engineering department, Hanyang university) ;
- Bae, Ki-Kwang (Korea Atomic Energy Research Institute) ;
- Yang, Myung-Seung (Korea Atomic Energy Research Institute) ;
- Lee, Jae-Sul (Korea Atomic Energy Research Institute) ;
- Park, Hyun-Soo (Korea Atomic Energy Research Institute)
- 발행 : 1996.11.01
초록
Research on the dry etching of UO
키워드