Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.103-104
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- 1996
Characterizations of fluoridated GaAs surface under remote $SF_6$ plasma
- Suh, Kyung-Soo (Semiconductor Technology Division, ETRI) ;
- Park, Sung-Woo (Semiconductor Technology Division, ETRI) ;
- Kim, Kwang-Ho (Department of Semiconductor Engineering, Cheong-Ju Univ.)
- Published : 1996.11.01
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