Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.69-69
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- 1996
Electric Properties of PLZT Thin Films Prepared Using ECR PECVD method for the Charge Storage Capacitor of a High Density Memory
ECR PECVD법으로 제조한 고접적 메모리 소자 charge storage capacitor용 PLZT 박막의 전기적 특성
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