Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.48-48
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- 1996
Behavior of Solid Phase Crystallization of LPCVD Amprphous Silicon Films by Nucleation-Interface-Control
핵생성 계면 제어에 의한 LPCVD 비정질 실리콘 박막의 고상 결정화 거동
Abstract
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