Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
- /
- Pages.165-165
- /
- 1996
Effect of $O_2$ Addition on the Microstructure of MOCVD Pt Thin Films during the Deposition
증착시 산소 첨가가 MOCVD Pt 박막의 미세구조에 미치는 영향
Abstract
Keywords