Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.23-23
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- 1996
The effect of Annealing Ambient on the Microstructure Change in $Pt/Ti/SiN_x$ Layer
$Pt/Ti/SiN_x$ 층의 미세구조변화에 미치는 어닐링분위기의 영향
Abstract
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