한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1996년도 추계학술대회 논문집
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- Pages.139-142
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- 1996
Sol-Gel 법에 의한 X/40/60 PLZT 박막의 전기 및 광학 특성
Electrical and Optical Characteristics of X/40/60 PLZT Thin Films by Sol-Gel Processing
초록
X/40/60 PLZT thin films were prepared by sol-gel processing and annealed by rapid thermal annealing(RTA). X/40/60 PLZT thin films were crystallized at 75
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